成像光栅:光谱仪的技术与应用(会议报告)

P. Triebel, T. Moeller, T. Diehl, A. Gatto, A. Pesch, Lars Erdmann, M. Burkhardt, Alexander Kalies
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引用次数: 0

摘要

对于成像光谱仪来说,除了偏振灵敏度和偏振效率外,衍射光栅的成像质量也是至关重要的。在不限制仪器整体成像质量的前提下,要求光栅具有低像差成像质量。光栅的波前像差是基片波前和光栅波前的综合。在光栅基板的制造过程中,可以采用不同的工艺来减小波前像差。由于全息的记录装置和一种特殊的技术,光栅的成像性能也得到了优化,这种技术也适用于弯曲基底的光刻胶。这种全息光栅制造技术用于不同类型的基底上的透射和反射光栅,如棱镜,凹凸球面和非球面形状,自由形状元件。所有制造的光栅都是单片的,可以涂上高反射和抗反射涂层。棱镜衬底用于制造紫外到红外光谱范围内的单片GRISM元件,最好是在透射下工作。除了透射光栅之外,许多光谱仪装置(如Offner, Rowland circle, Czerny-Turner系统布局)都在研究反射光栅的光学设计原理。该方法可用于制造高质量的EUV - IR反射光栅。在本文中,我们报告了基于全息工艺制造最低波前像差光栅的最新结果,以便在一定波长范围内实现至少衍射限制的复杂光谱设置。除了低像差光栅的研究成果外,还将展示衍射光栅在提高效率、降低偏振灵敏度和多波段性能方面的最新成果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Imaging gratings: Technology and applications for spectrometers (Conference Presentation)
For imaging spectrometers beside the polarization sensitivity and efficiency the imaging quality of the diffraction grating is essential. Low aberration imaging quality of the grating is required not to limit the overall imaging quality of the instrument. The wavefront aberration of an optical grating is a combination of the substrate wavefront and the grating wavefront. During the manufacturing process of the grating substrate different processes can be applied in order to minimize the wavefront aberrations. The imaging performance of the grating is also optimized due to the recording setup of the holography and a special technique to apply blazed profiles also in photoresist of curved substrates. This technology of holographically manufactured gratings is used for transmission and reflection gratings on different types of substrates like prisms, convex and concave spherical and aspherical surface shapes, free-form elements. All the manufactured gratings are monolithic and can be coated with high reflection and anti-reflection coatings. Prism substrates were used to manufacture monolithic GRISM elements for the UV to IR spectral range preferably working in transmission. Besides of transmission gratings, numerous spectrometer setups (e.g. Offner, Rowland circle, Czerny-Turner system layout) working on the optical design principles of reflection gratings. The present approach can be applied to manufacture high quality reflection gratings for the EUV to the IR. In this paper we report our latest results on manufacturing lowest wavefront aberration gratings based on holographic processes in order to enable at least diffraction limited complex spectrometric setups over certain wavelength ranges. Beside the results of low aberration gratings the latest achievements on improving efficiency together with less polarization sensitivity and multi-band performance of diffractive gratings will be shown.
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