{"title":"硅技术中的太赫兹显微镜","authors":"R. Al Hadi, Y. Zhao, J. Hwang, M. Chang","doi":"10.1109/IMBIoC47321.2020.9385018","DOIUrl":null,"url":null,"abstract":"This paper presents a terahertz microscope offering sub-wavelength resolution for imaging applications. The chip consists of a coupled terahertz Colpitts oscillators operating at 550GHz. It is implemented in a standard CMOS 65nm technology. A near-field sensing region between the oscillators is sensitive to external perturbation and results in a shift of the operating frequency. The far-field radiating frequency is extracted by an on-chip antenna and measured with an external harmonic mixer. The spatial resolution is verified with a micro-positioning stage.","PeriodicalId":297049,"journal":{"name":"2020 IEEE MTT-S International Microwave Biomedical Conference (IMBioC)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Terahertz Microscopy in Silicon Technology\",\"authors\":\"R. Al Hadi, Y. Zhao, J. Hwang, M. Chang\",\"doi\":\"10.1109/IMBIoC47321.2020.9385018\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a terahertz microscope offering sub-wavelength resolution for imaging applications. The chip consists of a coupled terahertz Colpitts oscillators operating at 550GHz. It is implemented in a standard CMOS 65nm technology. A near-field sensing region between the oscillators is sensitive to external perturbation and results in a shift of the operating frequency. The far-field radiating frequency is extracted by an on-chip antenna and measured with an external harmonic mixer. The spatial resolution is verified with a micro-positioning stage.\",\"PeriodicalId\":297049,\"journal\":{\"name\":\"2020 IEEE MTT-S International Microwave Biomedical Conference (IMBioC)\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-12-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE MTT-S International Microwave Biomedical Conference (IMBioC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMBIoC47321.2020.9385018\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE MTT-S International Microwave Biomedical Conference (IMBioC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMBIoC47321.2020.9385018","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents a terahertz microscope offering sub-wavelength resolution for imaging applications. The chip consists of a coupled terahertz Colpitts oscillators operating at 550GHz. It is implemented in a standard CMOS 65nm technology. A near-field sensing region between the oscillators is sensitive to external perturbation and results in a shift of the operating frequency. The far-field radiating frequency is extracted by an on-chip antenna and measured with an external harmonic mixer. The spatial resolution is verified with a micro-positioning stage.
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