基于粘滑的透射电镜微定位台

9th IEEE International Workshop on Advanced Motion Control, 2006. Pub Date : 2006-05-30 DOI:10.1109/AMC.2006.1631707

O. Holub, M. Spiller, Z. Hurák

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引用次数: 3

摘要

本文介绍了透射电子显微镜微定位台的设计工作。内容包括定位台的机械设计、锯齿状高压发生器、系统的实验鉴定报告、输入指令整形的一些思考和经验、电容式2轴位置传感器的有限元分析与设计以及该传感器的信号处理电路设计

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Stick-slip based micropositioning stage for transmission electron microscope

This paper presents work that has been done on design of a micropositioning stage for a transmission electron microscope. Topics covered include mechanical design of the positioning stage, sawtooth-like high voltage generator, report on experimental identification of the system, some thoughts and experience with input command shaping, finite-element analysis and design of capacitive 2-axis position sensor and design of signal processing circuitry for this sensor

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来源期刊

9th IEEE International Workshop on Advanced Motion Control, 2006.

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