窄链TPoS谐振器的设计

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2016-04-01 DOI:10.1109/NEMS.2016.7758287

Xinyi Li, J. Bao, Feihong Bao

{"title":"窄链TPoS谐振器的设计","authors":"Xinyi Li, J. Bao, Feihong Bao","doi":"10.1109/NEMS.2016.7758287","DOIUrl":null,"url":null,"abstract":"A novel kind of RF MEMS lateral extensional thin-film piezoelectric-on-silicon(TPoS) resonator with narrow tethers is proposed. The conventional three-layers supporting beams could be simplified to single material by utilizing different kinds of doping on the bulk structural silicon layer. Within the scope of the fabrication process allowed, the width of tethers could be decreased from 10μm to 2μm, which would greatly reduce the dissipation of the energy from anchors. The finite element analysis simulation results show that the quality factor of the resonator is raised from 13800 to 207300. One feasible way to fabricate this novel resonator is demonstrated. To overcome the disadvantage of power capacity limited by the P-N junction, one associative operating circuit is also introduced.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A design of TPoS resonator with narrow tether\",\"authors\":\"Xinyi Li, J. Bao, Feihong Bao\",\"doi\":\"10.1109/NEMS.2016.7758287\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel kind of RF MEMS lateral extensional thin-film piezoelectric-on-silicon(TPoS) resonator with narrow tethers is proposed. The conventional three-layers supporting beams could be simplified to single material by utilizing different kinds of doping on the bulk structural silicon layer. Within the scope of the fabrication process allowed, the width of tethers could be decreased from 10μm to 2μm, which would greatly reduce the dissipation of the energy from anchors. The finite element analysis simulation results show that the quality factor of the resonator is raised from 13800 to 207300. One feasible way to fabricate this novel resonator is demonstrated. To overcome the disadvantage of power capacity limited by the P-N junction, one associative operating circuit is also introduced.\",\"PeriodicalId\":150449,\"journal\":{\"name\":\"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2016.7758287\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2016.7758287","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

提出了一种新型的窄系带射频MEMS横向拉伸薄膜压电谐振器。通过在大块结构硅层上掺杂不同的材料，可以将传统的三层支撑梁简化为单一材料。在制造工艺允许的范围内，锚索宽度可从10μm减小到2μm，这将大大减少锚索能量的耗散。有限元分析仿真结果表明，该谐振器的质量因数由13800提高到207300。提出了一种可行的方法来制作这种新型谐振腔。为了克服pn结限制功率容量的缺点，还引入了一种联合工作电路。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A design of TPoS resonator with narrow tether

A novel kind of RF MEMS lateral extensional thin-film piezoelectric-on-silicon(TPoS) resonator with narrow tethers is proposed. The conventional three-layers supporting beams could be simplified to single material by utilizing different kinds of doping on the bulk structural silicon layer. Within the scope of the fabrication process allowed, the width of tethers could be decreased from 10μm to 2μm, which would greatly reduce the dissipation of the energy from anchors. The finite element analysis simulation results show that the quality factor of the resonator is raised from 13800 to 207300. One feasible way to fabricate this novel resonator is demonstrated. To overcome the disadvantage of power capacity limited by the P-N junction, one associative operating circuit is also introduced.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

自引率

0.00%

发文量