衬底对GaN光电探测器性能的影响

G.M. Smith, J. Redwing, J. Flynn, V. M. Phanse, R. Vaudo
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引用次数: 1

摘要

太阳盲紫外光电探测器有许多应用,包括导弹探测、火焰感应和太阳紫外监测。III-V型氮化物是这些应用的理想选择,因为它们具有宽的带隙,使探测器对可见光和红外辐射透明。在蓝宝石衬底上的光导氮化镓探测器已经发表了一些文章,但尚未研究缺陷密度对器件性能的影响。在本文中,我们描述了在蓝宝石、SiC和厚HVPE GaN基材上MOCVD生长GaN探测器的操作,并比较了这些探测器在每种基材上的器件性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Substrate effects on GaN photodetector performance
Solar-blind UV photodetectors have a number of applications including missile detection, flame sensing, and solar UV monitoring. The III-V nitrides are ideal for these applications due to their wide bandgaps, making detectors transparent to visible and infrared radiation. There have been several publications on photoconductive GaN detectors on sapphire substrates but the effects of defect density on device performance have not been investigated. In this paper we describe the operation of GaN detectors grown by MOCVD on sapphire, SiC, and thick HVPE GaN base layers and compare the device performance of the detectors on each of these substrates.
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