用声力显微镜表征计量石英晶体谐振器的弹性特性

Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052) Pub Date : 2000-06-07 DOI:10.1109/FREQ.2000.887348

F. Sthal, R. Bourquin

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引用次数: 0

摘要

提出了一种表征谐振器的新方法。该方法基于扫描声力显微镜。通过原子力相互作用，可以立即获得谐振腔的形貌和振动幅值数据。根据谐振器表面的法线来量化谐振器的振动幅值。研究了一种带有粘附电极的10mhz SC-cut BVA石英晶体谐振器。这种新的分析方法可以对谐振器的弹性特性进行映射。

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Characterization of the elastic properties of metrological quartz crystal resonators using acoustic force microscopy

A new method of characterizing resonators is presented. This method is based on scanning acoustic force microscopy. Data on the topography and the vibration amplitude of the resonator are obtained at once, by means of atomic force interaction. The vibration amplitude of the resonator is quantified according to the normal of the surface of the resonator. A 10 MHz SC-cut BVA quartz crystal resonator with adherent electrodes are studied. This new analysis allows the mapping of the elastic properties of the resonator to be made.

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Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052)

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