高密度记录用铁氧体锶薄膜的制备及其磁性能研究

Dongping Wu, Zheng-yin Yang, F. Wei, M. Matsumoto
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引用次数: 1

摘要

本文报道了铁氧体锶薄膜的制备及其磁性能。所有的样品膜都是用磁控溅射装置沉积的。衬底为热氧化硅片。研究了衬底温度(T(s))、氧分压和靶组分对结构和磁性能的影响。结果表明,当温度> 400℃时,薄膜开始结晶,提高衬底温度和氧分压有利于改善膜平面垂直的c轴取向。饱和磁化强度M,随衬底温度T的升高而增大,随氧分压的升高而略有减小。所制备的薄膜由目标组分SrO组成。4Fe(2)O(3)在600°c时垂直方向的M(s)和H(e)值最高,分别为321 emu/cm(3)和3.4 kOe。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Preparation and Magnetic Properties of Strontium Ferrite Thin Film for High Density Recording
This paper reports on the preparation and magnetic properties of strontium ferrite thin films. All specimen films were deposited by a de magnetron sputtering apparatus. The substrate is thermally oxidized silicon wafer. The effects of substrate temperature (T(s)), oxygen partial pressure and target composition on structure and magnetic properties were investigated. It is found that for T(s) > 400 degreesC the films begin to crystallize and the increase of substrate temperature and oxygen partial pressure are beneficial to improve c-axis orientation normal to the film plane. The saturation magnetization M,increases with the increase of substrate temperature T,and decreases slightly with the increase of oxygen partial pressure. The film prepared by the target composition of SrO . 4Fe(2)O(3) at 600 degreesC has the highest values of M(s) and H(e) in perpendicular direction, they are 321 emu/cm(3) and 3.4 kOe, respectively.
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