MEMS超声换能器的耦合

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI:10.1109/ICSENS.2003.1279056

D. Greve, I. Oppenheim

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引用次数: 9

摘要

MEMS超声换能器在医疗和无损检测应用中都具有潜在的价值。这些换能器的主要优点是它们的宽带宽以及经济制造探测器阵列的潜力。在本文中，我们讨论了与这些换能器与固体和液体介质耦合有关的问题。我们将表明，为了防止伪脉冲，需要适当选择耦合介质厚度。

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Coupling of MEMS ultrasonic transducers

MEMS ultrasonic transducers are potentially valuable in both medical and non-destructive testing applications. A prime advantage of these transducers is their wide bandwidth together with the potential for economical fabrication of detector arrays. In this paper, we discuss issues related to the coupling of these transducers to solid and liquid media. We will show that appropriate choice of the coupling medium thickness is required in order to prevent spurious pulses.

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Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)

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