S. Mori, K. Sawada, Manabu Tomita, K. Ogawa, Tsuyoshi Suzuki, H. Oishi, M. Bairo, Y. Fukuzaki, H. Ohnuma
{"title":"采用片上柔性脉冲发生器评估介电性能的高效通用测试结构","authors":"S. Mori, K. Sawada, Manabu Tomita, K. Ogawa, Tsuyoshi Suzuki, H. Oishi, M. Bairo, Y. Fukuzaki, H. Ohnuma","doi":"10.1109/ICMTS.2016.7476185","DOIUrl":null,"url":null,"abstract":"A highly effective and versatile test structure with a flexible pulse generating circuit is proposed. Several significant features of the key components are demonstrated, that is, the tunable ring oscillator, the start-stop pulse controller, the Charge Injection induced Error Free Charge Based Capacitance Measurement (CIEF-CBCM) using Self-Aligned pulses and the modified Charge Pumping (CP) technique. This circuit system enables efficiently to collect data of multiple dielectric properties.","PeriodicalId":344487,"journal":{"name":"2016 International Conference on Microelectronic Test Structures (ICMTS)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip\",\"authors\":\"S. Mori, K. Sawada, Manabu Tomita, K. Ogawa, Tsuyoshi Suzuki, H. Oishi, M. Bairo, Y. Fukuzaki, H. Ohnuma\",\"doi\":\"10.1109/ICMTS.2016.7476185\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A highly effective and versatile test structure with a flexible pulse generating circuit is proposed. Several significant features of the key components are demonstrated, that is, the tunable ring oscillator, the start-stop pulse controller, the Charge Injection induced Error Free Charge Based Capacitance Measurement (CIEF-CBCM) using Self-Aligned pulses and the modified Charge Pumping (CP) technique. This circuit system enables efficiently to collect data of multiple dielectric properties.\",\"PeriodicalId\":344487,\"journal\":{\"name\":\"2016 International Conference on Microelectronic Test Structures (ICMTS)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-03-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 International Conference on Microelectronic Test Structures (ICMTS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS.2016.7476185\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2016.7476185","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip
A highly effective and versatile test structure with a flexible pulse generating circuit is proposed. Several significant features of the key components are demonstrated, that is, the tunable ring oscillator, the start-stop pulse controller, the Charge Injection induced Error Free Charge Based Capacitance Measurement (CIEF-CBCM) using Self-Aligned pulses and the modified Charge Pumping (CP) technique. This circuit system enables efficiently to collect data of multiple dielectric properties.