{"title":"薄膜太阳能电池的孔隙度控制:二维情况","authors":"Jianqiao Huang, G. Orkoulas, P. Christofides","doi":"10.1109/ACC.2013.6580067","DOIUrl":null,"url":null,"abstract":"This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.","PeriodicalId":145065,"journal":{"name":"2013 American Control Conference","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Porosity control in thin film solar cells: Two-dimensional case\",\"authors\":\"Jianqiao Huang, G. Orkoulas, P. Christofides\",\"doi\":\"10.1109/ACC.2013.6580067\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.\",\"PeriodicalId\":145065,\"journal\":{\"name\":\"2013 American Control Conference\",\"volume\":\"32 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 American Control Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ACC.2013.6580067\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 American Control Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ACC.2013.6580067","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Porosity control in thin film solar cells: Two-dimensional case
This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.