一种新的半解析方法用于多段互连中的快速电迁移应力分析

Olympia Axelou, N. Evmorfopoulos, G. Floros, G. Stamoulis, S. Sapatnekar
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引用次数: 4

摘要

随着集成电路技术发展到10nm以下,由于对性能、散热和功耗的要求越来越严格,电迁移(EM)已经成为长期可靠性的重要问题。由于电网结构中存在较大的单向电流,因此电磁问题在电网中变得更加突出。在过去的几年里,对电磁分析的关注已经被吸引到精确的基于物理的模型中,该模型描述了电子风力和背应力之间的相互作用,在一个涉及电线应力的单一偏微分方程(PDE)中。本文提出了一种求解电网多段线中离散空间点应力PDE的快速半解析方法,可实现对多段线中任意时刻的电磁应力独立解析计算。我们的方法利用了离散应力系数矩阵的具体形式,其特征值和特征向量是事先已知的。因此,可以构造具有几乎线性时间复杂度的闭型方程,而不需要时间离散化。该封闭式方程可在任何给定时间用于瞬态应力分析。我们使用工业IBM电网基准测试的实验结果表明,与工业工具COMSOL相比,我们的方法具有出色的准确性,同时速度快了几个数量级。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Novel Semi-Analytical Approach for Fast Electromigration Stress Analysis in Multi-Segment Interconnects
As integrated circuit technologies move below 10 nm, Electromigration (EM) has become an issue of great concern for the longterm reliability due to the stricter performance, thermal and power requirements. The problem of EM becomes even more pronounced in power grids due to the large unidirectional currents flowing in these structures. The attention for EM analysis during the past years has been drawn to accurate physics-based models describing the interplay between the electron wind force and the back stress force, in a single Partial Differential Equation (PDE) involving wire stress. In this paper, we present a fast semi-analytical approach for the solution of the stress PDE at discrete spatial points in multi-segment lines of power grids, which allows the analytical calculation of EM stress independently at any time in these lines. Our method exploits the specific form of the discrete stress coefficient matrix whose eigenvalues and eigenvectors are known beforehand. Thus, a closed-form equation can be constructed with almost linear time complexity without the need of time discretization. This closed-form equation can be subsequently used at any given time in transient stress analysis. Our experimental results, using the industrial IBM power grid benchmarks, demonstrate that our method has excellent accuracy compared to the industrial tool COMSOL while being orders of magnitude times faster.
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