基于微泵流控策略的钙钛矿/硅周期微线阵列光电子应用研究

Xin Bin, I. Roqan
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引用次数: 0

摘要

我们探索了一种将钙钛矿材料注入硅微通道的微泵策略,允许在规则间隔(周期)的硅微槽(~ 1000 mw /mm)内形成许多钙钛矿微线(mw)。采用无掩模激光干涉光刻技术制备周期硅微通道。在泵送钙钛矿之前,将SiO2层沉积在Si阵列上,以提高器件性能。我们展示了一种基于均匀钙钛矿MWs/SiO2/Si周期阵列的高响应光电探测器的成本效益零浪费制造方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of Perovskite/Si periodic microwire arrays via micro-pump fluidic strategy for optelectronics applications
We explore a micro-pump strategy for injecting perovskite materials into Si micro-channels, allowing fabrication of many perovskite micro-wires (MWs) to form inside the regularly-spaced (periodic) Si micro-grooves (~ 1000 MWs/mm). Mask-free laser interference lithography is used to produce periodic Si micro-channels. The SiO2 layer is deposited on the Si array before pumping perovskite to enhance the device performance. We demonstrate a cost-effective zero-waste fabrication method of highly responsive photodetectors based on uniform perovskite MWs/SiO2/Si periodic arrays.
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