j型双晶片微致动器电热微镜

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925056

Liang Zhou, Dingkang Wang, Huikai Xie

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引用次数: 1

摘要

为了提高鲁棒性和稳定性，设计了一种带有四个j型双晶片微致动器的尖端倾斜活塞微反射镜。中心镜板直径为1mm，整个器件占地面积仅为1.6 × 1.6 mm2。微镜在2.8 Vdc下扫描3°(光学)。活塞模式和旋转模式分别在880 Hz和1555 Hz下测量。

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An Electrothermal Micromirror with J-shaped Bimorph Microactuators

A tip-tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 × 1.6 mm2. The micromirror scans 3° (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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