基于耦合谐振器序列的制造误差估计的片上测试结构

2015 IEEE 12th International Conference on Group IV Photonics (GFP) Pub Date : 2015-08-01 DOI:10.1109/GROUP4.2015.7305990

M. Borghi, M. Mancinelli, J. Fédéli, Lorenzo Pavesi

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引用次数: 0

摘要

我们报道了一种片上测试结构的实现，该结构可以量化光刻工艺的制造误差程度。该装置基于一系列耦合谐振器，并允许在芯片上执行直接测试测量。

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On chip test structure for fabrication error estimation based on a sequence of coupled resonators

We report on the realization of an on chip test structure which quantifies the degree of fabrication error of a photolithographic process. The device is based on a sequence of coupled resonators and allows performing a direct on chip test measurement.

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2015 IEEE 12th International Conference on Group IV Photonics (GFP)

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