电极几何形状对光导硅片高场特性的影响

V. Madangarli, G. Gradinaru, G. Korony, T. Sudarshan, G. Loubriel, F. Zutavern, P. E. Patterson
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引用次数: 2

摘要

通过一系列实验研究了电极几何形状对高电阻率({rho} > 30 k{Omega}-cm) p型硅晶片在准均匀和非均匀电场配置下的预击穿(和击穿)特性的影响。在准均匀场配置中,将1mm厚的硅晶片安装在两个平面平行的不锈钢圆盘电极(平行)的凹槽之间,而将硅晶片安装在两个端部为半球形的柱型电极(柱)之间获得非均匀场。上述研究的主要目的是验证平行系统下的均匀场配置是否通过减少接触区域的场增强而产生积极影响,而非均匀柱系统中存在明确的场增强。此外,还提出了研究接触轮廓对硅片表面场分布的影响,从而影响硅片的高场性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence Of Electrode Geometry On The High-field Characteristics Of Photoconductive Silicon Wafers
A series of experiment were conducted to study the influence of electrode geometry on the prebreakdown (and breakdown) characteristics of high resistivity ({rho} > 30 k{Omega}-cm), p-type Si wafers under quasi-uniform and non-uniform electric field configurations. In the quasi-uniform field configuration, the 1mm thick Si wafer was mounted between the slots of two plane parallel stainless steel disc electrodes (parallel), while the non-uniform field was obtained by mounting the wafer between two pillar-type electrodes with a hemispherical tip (pillar). The main objective of the above investigation was to verify if the uniform field configuration under a parallel system has a positive influence by reducing the field enhancement at the contact region, as opposed to the definite field enhancement present in the case of the non-uniform pillar system. Also, it was proposed to study the effect of the contact profile on the field distribution over the wafer surface and hence its influence on the high-field performance of the Si wafers.
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