非负电容双栅极finfet的优化

Wenjing Bai, Jianping Hu, Tingfeng Yang
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引用次数: 1

摘要

在本文中,我们介绍了一种新的负电容器件,称为负电容非依赖性双栅极finfet (nc - idg - finfet),它可以减少电路设计中使用的晶体管数量。我们将薄铁电(FE)层堆叠到基线传统独立双栅极FinFET器件的两个栅极堆叠中。我们选择具有负电容效应的材料为HfSiO(典型各向异性常数为$\alpha_{FE}=-8.65\mathrm{e}10$ cm/F、$\beta_{FE}=1.92\mathrm{e}20$ cm5/ F/C2和$\gamma_{FE}=0$ cm9/F/C4)。在FE层和通道之间使用高k介电介质Hf02。我们通过调节铁电厚度来优化导通电流、漏电流和开关电流比。仿真结果表明,该器件可以提高导通电流,减小漏电流,提高开关电流比。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimizations of Negative Capacitance Independent Dual-Gate FinFETs
In this paper, we introduce a novel negative-capacitance device, named as negative-capacitance independent dual-gate FinFETs (NC-IDG-FinFETs) that can reduce the number of transistors used in circuit designs. We stack thin ferroelectric (FE) layers into the two gate stacks of baseline traditional independent dual-gate FinFET devices. We chose HfSiO (with the typical anisotropy constants of $\alpha_{FE}=-8.65\mathrm{e}10$ cm/F, $\beta_{FE}=1.92\mathrm{e}20$ cm5/ F/C2, and $\gamma_{FE}=0$ cm9/F/C4) as the material with negative capacitance effect. The high-K dielectric Hf02 is used between the FE layer and the channel. We optimize the turn-on currents, leakage currents, and the switching current ratio by adjusting ferroelectric thickness. Simulation results show that the proposed devices can increase the on-state current and decrease the leakage current, and increase the switching current ratio.
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