保持激光干涉仪12m动态标定系统热稳定性的新型风淋方法

2021 IEEE 15th International Conference on Electronic Measurement & Instruments (ICEMI) Pub Date : 2021-10-29 DOI:10.1109/ICEMI52946.2021.9679646

Junning Cui, Wenwen Cui, Yesheng Lu, Zhou Tong

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引用次数: 0

摘要

为了满足现有激光干涉仪12m动态标定系统对环境稳定性的要求，提出了一种新型的保持远程激光干涉光路热稳定性的风淋方法。可实现空气快速控温的电加热方式与适合高精度控温的换热方式有机结合，完成对空气的快速高精度控温，实现恒温空气的生产。利用仿真软件对系统的风淋室温度控制效果进行了计算和分析，验证了方案的可行性。实验结果表明，所研制的远程激光干涉光路高精度热控制系统基本能达到±0.023℃的热稳定性，满足激光干涉仪12m动态标定系统的要求。

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Novel Air Shower Approach to Maintain Thermal Stability for 12m Dynamic Calibration System of Laser Interferometer

In order to meet the requirements of environmental stability of the existing 12m dynamic calibration system of laser interferometer, a novel air shower approach to maintain thermal stability for long-range laser interference optical path is proposed. The electric heating mode which can realize the rapid temperature control of air is organically combined with the heat exchange mode suitable for high-precision temperature control to complete the rapid and high-precision temperature control of air and realize the production of constant temperature air. By using simulation software to calculate and analyze the air shower temperature control effect of the system, the scheme is verified to be feasible. The experimental result shows that the developed high-precision thermal control system for long-range laser interference optical path can basically reach a thermal stability of ±0.023°C and fulfill the requirements of 12m dynamic calibration system of laser interferometer.

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2021 IEEE 15th International Conference on Electronic Measurement & Instruments (ICEMI)

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