基于一维光子晶体的二氧化氮气体传感器的制备与表征

W. Maulina, M. Rahmat, E. Rustami, M. Azis, D. R. Budiarti, D.Y.N. Miftah, A. Maniur, A. Tumanggor, N. Sukmawati, H. Alatas, K. Seminar, A. Yuwono
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引用次数: 8

摘要

我们利用BK-7玻璃基板,在573K的温度下,在10−3Pa的压力下,通过电子束蒸发法制备了相应的光子晶体结构。该PC装置作为传感器用于检测溶解在特定试剂Griess Saltzmann中的NO2气体浓度。通过光谱测量发现,NO2气体的吸收光谱在光源波长500 ~ 550 nm范围内。基于这一事实,我们将pc设置为允许波长为550nm的光子通带(PPB)。为了提高性能,该装置被设计为同时基于吸收和PPB变化现象工作。实验结果表明,该装置的响应与溶解NO2气体浓度呈线性相关,具有较高的灵敏度,测定系数可达99%。该传感器具有应用于空气污染指数测量系统的潜力
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication and characterization of NO2 gas sensor based on one dimensional photonic crystal for measurement of air pollution index
We have fabricated the corresponding photonic crystal (PC) structure by means of electron beam evaporation in a sample chamber at a pressure of 10−3Pa with BK-7 glass substrate at temperatures of 573K. This PC device is applied as a sensor to detect the concentration of NO2 gas dissolved in specific reagent Griess Saltzmann. From spectroscopic measurement it is found that the absorption spectral of the NO2 gas to be in the range of light source wavelength 500–550 nm. Based on this fact, we set up the PCs to admit a photonic pass band (PPB) at a wavelength of 550 nm. To enhance the performance, the device is designed to work on the basis of both absorption and PPB variation phenomena. The experimental results show that the response of the device correlates linearly with the concentration of dissolved NO2 gas and exhibits high sensitivity with coefficient determination of 99%. This sensor is potential to apply in an air pollution index measurement system
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