Design and Manufacturing Technology of Planar Coil for Magnetic Recoil Generator

In order to improve the productivity efficiency of the magnetic recoil generator, the coil part of the device is optimized, and the traditional winding coil is replaced by the planar coil. The planar coil adopts the way of laser precision cutting after layer plating metal film to form a split conductor structure, so as to reduce the energy loss caused by skin effect. In this paper, the influence of magnetron sputtering parameters on the tensile strength and deposition rate of metal film on planar coil substrate was studied experimentally. The specific process parameters were determined as follows: target substrate distance was set at 8cm, working vacuum was 1Pa, argon gas flow rate was 100sccm when copper and nichrome films were plated. The target power is set at 188W for copper coating and 156W for nichrome coating. The resistance of the planar coil obtained by metal film plating and laser precision cutting is tested, which meets the product requirements.