77-GHz mmic共面波导元件的建模

J. Gerdes, F. Schmuckle, C. Rheinfelder, W. Heinrich
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引用次数: 2

摘要

建立了适用于w波段MMIC设计的硅衬底共面波导不连续和结的有效模型。该模型由线段和集总单元等效电路组成,通过有限差分频域计算的解析提取得到。它们通过在硅衬底上制造的测试结构进行高达90 GHz的晶圆测量来验证。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling of coplanar waveguide elements for 77-GHz - MMICs
Efficient models for coplanar waveguide (CPW) discontinuities and junctions on Si substrate have been developed, which are suitable for W-band MMIC design. The models consist of line sections and lumped-element equivalent circuits and were derived by analytical extraction from Finite-Difference frequency domain calculations. They are validated by on-wafer measurements up to 90 GHz using test structures fabricated on silicon substrate.
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