基于氮化铝薄膜固体谐振器的阶梯滤波器分析

2021 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) Pub Date : 2021-05-31 DOI:10.1109/WECONF51603.2021.9470544

T. N. Torgash, A. Kozlov, N. A. Chirikov, V. Strunin

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引用次数: 2

摘要

考虑了基于带布拉格反射器的微电子BAW谐振器的阶梯滤波器的T -和u -共享链路。制作了工作频率为3.7 GHz、质量因数为518的压电氮化铝薄膜BAW谐振器。对梯形滤波器的电气特性进行了分析研究。结果表明，在谐振带宽为10 ~ 15 MHz的谐振器上，可以得到相对带宽为1%的阶梯滤波器。梯形滤波器的最小插入损耗为-2.9 dB。对于带有三个BAW谐振器的u共享链路，在5%偏移时阻带的最大保证衰减为-41.4 dB。

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Analysis of Ladder Filters based on Solidly Mounted Resonators with Aluminum Nitride Thin Film

$T$- and U-shared links of ladder filters based on microelectronic BAW resonators with a Bragg reflector are considered. The BAW resonator with a piezoelectric aluminum nitride thin film operated at a frequency of 3.7 GHz and has a quality factor of 518 is fabricated. The analytical studies of the electrical characteristics of ladder filters are presented. It is shown that ladder filter with a relative bandwidth of the order of 1 % can be obtained based on the resonators with resonance bandwidth equal to 10…15 MHz. The minimum insertion loss of the ladder filter is -2.9 dB. The maximum guaranteed attenuation in the stopband at 5 % offset is -41.4 dB for a U-shared link with three BAW resonators.

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2021 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF)

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