{"title":"使用力敏感电容对微机械力的精确测量","authors":"M. R. Wolffenbuttel, P. Regtien","doi":"10.1109/CPEM.1994.333271","DOIUrl":null,"url":null,"abstract":"A sensor for the precise and accurate measurement of micro-mechanical forces is presented. The sensor is used to detect a tactile image and has capacitive force sensing elements which are detected by charge readout. The mechanical performance of the force sensor is evaluated and verified with experiments. The force-to-deflection and deflection measurements have been separated in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm/sup 2/ in size, it has a force range of 0.25 mN and a capacitance of 2 pF. The amplifier detects capacitance changes of 15 fF with a maximum non-linearity of 0.01% over the 1.25-2.5 pF range.<<ETX>>","PeriodicalId":388647,"journal":{"name":"Proceedings of Conference on Precision Electromagnetic Measurements Digest","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"The accurate measurement of a micromechanical force using force-sensitive capacitances\",\"authors\":\"M. R. Wolffenbuttel, P. Regtien\",\"doi\":\"10.1109/CPEM.1994.333271\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A sensor for the precise and accurate measurement of micro-mechanical forces is presented. The sensor is used to detect a tactile image and has capacitive force sensing elements which are detected by charge readout. The mechanical performance of the force sensor is evaluated and verified with experiments. The force-to-deflection and deflection measurements have been separated in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm/sup 2/ in size, it has a force range of 0.25 mN and a capacitance of 2 pF. The amplifier detects capacitance changes of 15 fF with a maximum non-linearity of 0.01% over the 1.25-2.5 pF range.<<ETX>>\",\"PeriodicalId\":388647,\"journal\":{\"name\":\"Proceedings of Conference on Precision Electromagnetic Measurements Digest\",\"volume\":\"25 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-06-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of Conference on Precision Electromagnetic Measurements Digest\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CPEM.1994.333271\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of Conference on Precision Electromagnetic Measurements Digest","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CPEM.1994.333271","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The accurate measurement of a micromechanical force using force-sensitive capacitances
A sensor for the precise and accurate measurement of micro-mechanical forces is presented. The sensor is used to detect a tactile image and has capacitive force sensing elements which are detected by charge readout. The mechanical performance of the force sensor is evaluated and verified with experiments. The force-to-deflection and deflection measurements have been separated in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm/sup 2/ in size, it has a force range of 0.25 mN and a capacitance of 2 pF. The amplifier detects capacitance changes of 15 fF with a maximum non-linearity of 0.01% over the 1.25-2.5 pF range.<>
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