金薄膜导体的电迁移失效

B. Agarwala
{"title":"金薄膜导体的电迁移失效","authors":"B. Agarwala","doi":"10.1109/IRPS.1975.362683","DOIUrl":null,"url":null,"abstract":"Experiments are carried out to understand the electromigration-induced failure mechanism in thin-film Au conductors. The activation energy for the atom transport and the magnitude of the current exponent In the failure equation are obtained. The role of surface coverage on the reliability of AU stripes is studied. The underlying mode of atom transport and the possible sources of flux divergences are discussed in terms of these results.","PeriodicalId":369161,"journal":{"name":"13th International Reliability Physics Symposium","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1975-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Electromigration Failure in Au Thin-Film Conductors\",\"authors\":\"B. Agarwala\",\"doi\":\"10.1109/IRPS.1975.362683\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Experiments are carried out to understand the electromigration-induced failure mechanism in thin-film Au conductors. The activation energy for the atom transport and the magnitude of the current exponent In the failure equation are obtained. The role of surface coverage on the reliability of AU stripes is studied. The underlying mode of atom transport and the possible sources of flux divergences are discussed in terms of these results.\",\"PeriodicalId\":369161,\"journal\":{\"name\":\"13th International Reliability Physics Symposium\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1975-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"13th International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1975.362683\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"13th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1975.362683","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

摘要

通过实验研究了金薄膜导体的电迁移失效机理。得到了原子输运的活化能和失效方程中电流指数的大小。研究了表面覆盖度对AU条纹可靠性的影响。根据这些结果讨论了原子输运的基本模式和可能的通量发散源。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electromigration Failure in Au Thin-Film Conductors
Experiments are carried out to understand the electromigration-induced failure mechanism in thin-film Au conductors. The activation energy for the atom transport and the magnitude of the current exponent In the failure equation are obtained. The role of surface coverage on the reliability of AU stripes is studied. The underlying mode of atom transport and the possible sources of flux divergences are discussed in terms of these results.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信