织构硅片光学特性的实验与理论分析

V. Moroz, Joanne Huang, K. Wijekoon, D. Tanner
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引用次数: 11

摘要

对单晶硅片进行了光学分析,分别对有无织构、有无掺杂POCl、前表面钝化抗反射氮化膜、后表面丝网印刷铝导体进行了光学分析。反射率的测量波长范围为300nm至1200nm。利用光线追踪技术对规则和随机纹理模式进行光反射率、吸光度和透光率的建模。利用标准材料的光学特性,得到了亚1微米波长的测量数据和模型数据的良好一致性。然而,1微米波长以上的红外光需要考虑存在于硅表面的几层单层厚的天然氧化物,并调整用于太阳能电池制造的特定氮化物和铝膜的光学特性。结果表明,随机纹理比常规纹理的光捕获效果好15% ~ 20%。理论分析对这种效应提供了合理的解释,并提出了进一步提高纹理表面光学性能的方法。光学建模方法可以用于寻找不同太阳能电池设计的纹理和钝化/接触膜的最佳组合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Experimental and theoretical analysis of the optical behavior of textured silicon wafers
Optical analysis is performed for mono-crystalline silicon wafers with and without the texture and with and without the POCl doping, the passivating anti-reflective nitride film on front surface, and the screen printed aluminum conductor on the back surface. Reflectance is measured in the wavelength range from 300 nm to 1200 nm. Modeling of the light reflectance, absorbance, and transmittance is done using ray-tracing technique for the regular and the random texture patterns. Good agreement of measured and modeled data is obtained for the sub — 1 micron wavelengths by using standard material optical properties. However, the infrared light above the 1 micron wavelength requires accounting for several mono-layers thick native oxide present on silicon surfaces and adjusting the optical properties of specific nitride and aluminum films used in the solar cell manufacturing. It is found that the random texture exhibits 15% to 20% better light capture than the regular texture. Theoretical analysis provides plausible explanation of this effect and suggests a way to further improve optical performance of the textured surfaces. The optical modeling methodology can be used to find the optimum combination of texture and passivating/contact films for different solar cell designs.
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