T. V. Vlasov, R. Volkov, V. Gordienko, M. S. Dzhidzhoev, V. Kulikauskas, A. Savel’ev, V. Chernysh
{"title":"超短激光脉冲烧蚀及其烧蚀产物的空间分布","authors":"T. V. Vlasov, R. Volkov, V. Gordienko, M. S. Dzhidzhoev, V. Kulikauskas, A. Savel’ev, V. Chernysh","doi":"10.1117/12.464134","DOIUrl":null,"url":null,"abstract":"In this work we present the results of experimental investigations of laser ablation initiated by 200 fs and 30 ps laser pulses with the energy fluence of ~0.2 J/cm2. It was shown that in the case of picosecond pulses the ablation depth is governed by the thermal conductivity whereas in the case of femtosecond pulses the skin-layer depth is the major parameter. We also obtained that the duration and the energy fluence of laser pulse strongly affects spatial distribution of stoichiometric composition of sputtered material.","PeriodicalId":194489,"journal":{"name":"International Conference on Laser and Laser Information Technologies","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ultrashort laser pulse ablation and spatial distribution of ablation products of NiMoRe target\",\"authors\":\"T. V. Vlasov, R. Volkov, V. Gordienko, M. S. Dzhidzhoev, V. Kulikauskas, A. Savel’ev, V. Chernysh\",\"doi\":\"10.1117/12.464134\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work we present the results of experimental investigations of laser ablation initiated by 200 fs and 30 ps laser pulses with the energy fluence of ~0.2 J/cm2. It was shown that in the case of picosecond pulses the ablation depth is governed by the thermal conductivity whereas in the case of femtosecond pulses the skin-layer depth is the major parameter. We also obtained that the duration and the energy fluence of laser pulse strongly affects spatial distribution of stoichiometric composition of sputtered material.\",\"PeriodicalId\":194489,\"journal\":{\"name\":\"International Conference on Laser and Laser Information Technologies\",\"volume\":\"71 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Laser and Laser Information Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.464134\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Laser and Laser Information Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.464134","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ultrashort laser pulse ablation and spatial distribution of ablation products of NiMoRe target
In this work we present the results of experimental investigations of laser ablation initiated by 200 fs and 30 ps laser pulses with the energy fluence of ~0.2 J/cm2. It was shown that in the case of picosecond pulses the ablation depth is governed by the thermal conductivity whereas in the case of femtosecond pulses the skin-layer depth is the major parameter. We also obtained that the duration and the energy fluence of laser pulse strongly affects spatial distribution of stoichiometric composition of sputtered material.