超短激光脉冲烧蚀及其烧蚀产物的空间分布

T. V. Vlasov, R. Volkov, V. Gordienko, M. S. Dzhidzhoev, V. Kulikauskas, A. Savel’ev, V. Chernysh
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引用次数: 0

摘要

本文介绍了能量影响为~0.2 J/cm2的200fs和30ps激光脉冲对激光烧蚀的实验研究结果。结果表明,皮秒脉冲的烧蚀深度主要受热导率的影响,而飞秒脉冲的烧蚀深度主要受皮肤层深度的影响。激光脉冲的持续时间和能量影响对溅射材料化学计量成分的空间分布有很大影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultrashort laser pulse ablation and spatial distribution of ablation products of NiMoRe target
In this work we present the results of experimental investigations of laser ablation initiated by 200 fs and 30 ps laser pulses with the energy fluence of ~0.2 J/cm2. It was shown that in the case of picosecond pulses the ablation depth is governed by the thermal conductivity whereas in the case of femtosecond pulses the skin-layer depth is the major parameter. We also obtained that the duration and the energy fluence of laser pulse strongly affects spatial distribution of stoichiometric composition of sputtered material.
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