基于宽禁带半导体的紫外金属-半导体-金属光电探测器的暗电流减少

S. Butun, M. Gokkavas, Hongbo Yu, V. Strupinski, E. Ozbay
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摘要

展示了半绝缘GaN模板上的光电探测器。与在常规GaN模板上制作的光电探测器相比,它们表现出更低的暗电流。在外延厚SiC模板上制作的光电探测器中观察到类似的行为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dark current reduction in ultraviolet metal-semiconductor-metal photodetectors based on wide band-gap semiconductors
Photodetectors on semi-insulating GaN templates were demonstrated. They exhibit lower dark current compared to photodetectors fabricated on regular GaN templates. Similar behavior observed in photodetectors fabricated on epitaxially thick SiC templates.
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