O. V. Anisimov, N. Maksimova, E. Chernikov, E. Y. Sevastyanov, N. Sergeychenko
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Sensitivity to NH3 of SnO2 thin films prepared by magnetron sputtering
SnO2 thin film sensor was fabricated with microelectronic technology and NH3 (ammonia) gas sensing characteristics were measured in a temperature range 200–375 °C. It was observed that surface doping with platinum improves significantly the material's sensitivity to ammonia, and the optimal operational temperature of the sensor was 325 °C. The sensor showed high sensitivity to low NH3 concentration in the range 20–350 ppm with relatively fast response (10 s) and recovery times (30 s), respectively.
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