同时测量电子化合物的温度和膨胀

2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium Pub Date : 2011-03-20 DOI:10.1109/STHERM.2011.5767201

M. Fontaine, E. Joubert, O. Latry, C. Gauthier, C. Regard, H. Polaert, P. Eudeline, M. Ketata

{"title":"同时测量电子化合物的温度和膨胀","authors":"M. Fontaine, E. Joubert, O. Latry, C. Gauthier, C. Regard, H. Polaert, P. Eudeline, M. Ketata","doi":"10.1109/STHERM.2011.5767201","DOIUrl":null,"url":null,"abstract":"In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode.","PeriodicalId":128077,"journal":{"name":"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Simultaneous measures of temperature and expansion on electronic compound\",\"authors\":\"M. Fontaine, E. Joubert, O. Latry, C. Gauthier, C. Regard, H. Polaert, P. Eudeline, M. Ketata\",\"doi\":\"10.1109/STHERM.2011.5767201\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode.\",\"PeriodicalId\":128077,\"journal\":{\"name\":\"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium\",\"volume\":\"31 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-03-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/STHERM.2011.5767201\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STHERM.2011.5767201","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

本文提出了一种测量微电子化合物物理值的新方法。实际上，光学系统被用来同时量化一个部件的表面温度和膨胀。这是用迈克尔逊干涉仪完成的。为了比较该方法，将测量温度与另外两种方法(红外相机和ESD二极管)进行了关联。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Simultaneous measures of temperature and expansion on electronic compound

In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium

自引率

0.00%

发文量