用于肺活计的硅MEMS热流传感器灵敏度分析

2011 2nd International Conference on Instrumentation, Communications, Information Technology, and Biomedical Engineering Pub Date : 2011-12-22 DOI:10.1109/ICICI-BME.2011.6108619

Ihsan Hariadi

{"title":"用于肺活计的硅MEMS热流传感器灵敏度分析","authors":"Ihsan Hariadi","doi":"10.1109/ICICI-BME.2011.6108619","DOIUrl":null,"url":null,"abstract":"This paper presents the results of FEM (Finite Element Modeling) analysis of Integrated Thermal Flow Sensor intended to be used in a Spirometer to measure air flow generated by human's respiratory. Using calculated air flow, the sensor output is used to predict the air flow pattern characterized by two physical parameters, known as FVC and FEV. It is shown that different geometrical design, namely the distance between the heater and the temperature detector has important effects on the sensor sensitivity, and hence its capability for identifying the respiratory health condition of the patient, whether it is normal, resistive or obstructive.","PeriodicalId":395673,"journal":{"name":"2011 2nd International Conference on Instrumentation, Communications, Information Technology, and Biomedical Engineering","volume":"114 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-12-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Sensitivity analysis of silicon MEMS Thermal Flow Sensor for spirometer application\",\"authors\":\"Ihsan Hariadi\",\"doi\":\"10.1109/ICICI-BME.2011.6108619\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the results of FEM (Finite Element Modeling) analysis of Integrated Thermal Flow Sensor intended to be used in a Spirometer to measure air flow generated by human's respiratory. Using calculated air flow, the sensor output is used to predict the air flow pattern characterized by two physical parameters, known as FVC and FEV. It is shown that different geometrical design, namely the distance between the heater and the temperature detector has important effects on the sensor sensitivity, and hence its capability for identifying the respiratory health condition of the patient, whether it is normal, resistive or obstructive.\",\"PeriodicalId\":395673,\"journal\":{\"name\":\"2011 2nd International Conference on Instrumentation, Communications, Information Technology, and Biomedical Engineering\",\"volume\":\"114 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-12-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 2nd International Conference on Instrumentation, Communications, Information Technology, and Biomedical Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICICI-BME.2011.6108619\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 2nd International Conference on Instrumentation, Communications, Information Technology, and Biomedical Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICICI-BME.2011.6108619","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文介绍了用于呼吸量计的集成式热流传感器的有限元分析结果。利用计算出的气流，传感器输出用于预测由两个物理参数表征的气流模式，称为FVC和FEV。结果表明，不同的几何设计，即加热器与温度检测器之间的距离对传感器的灵敏度有重要影响，从而影响其识别患者呼吸健康状况的能力，无论是正常的，电阻的还是阻塞性的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Sensitivity analysis of silicon MEMS Thermal Flow Sensor for spirometer application

This paper presents the results of FEM (Finite Element Modeling) analysis of Integrated Thermal Flow Sensor intended to be used in a Spirometer to measure air flow generated by human's respiratory. Using calculated air flow, the sensor output is used to predict the air flow pattern characterized by two physical parameters, known as FVC and FEV. It is shown that different geometrical design, namely the distance between the heater and the temperature detector has important effects on the sensor sensitivity, and hence its capability for identifying the respiratory health condition of the patient, whether it is normal, resistive or obstructive.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2011 2nd International Conference on Instrumentation, Communications, Information Technology, and Biomedical Engineering

自引率

0.00%

发文量