光致发光分析在光刻胶中直接激光书写技术的自动聚焦

{"title":"光致发光分析在光刻胶中直接激光书写技术的自动聚焦","authors":"Edy Yulianto, V. Mizeikis","doi":"10.1063/5.0112034","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":130419,"journal":{"name":"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Autofocusing on direct laser writing techniques in photoresist using photoluminescence analysis\",\"authors\":\"Edy Yulianto, V. Mizeikis\",\"doi\":\"10.1063/5.0112034\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":130419,\"journal\":{\"name\":\"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021\",\"volume\":\"37 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1063/5.0112034\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIAL AND TECHNOLOGY (ICAMT) 2021","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/5.0112034","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}