利用衍射波初始相位测量表面浮雕光栅轮廓的方法

International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors Pub Date : 2015-11-06 DOI:10.1117/12.2197989

Fanrong Feng, Jianhong Wu, Fei Gao

{"title":"利用衍射波初始相位测量表面浮雕光栅轮廓的方法","authors":"Fanrong Feng, Jianhong Wu, Fei Gao","doi":"10.1117/12.2197989","DOIUrl":null,"url":null,"abstract":"The analysis of initial phase of diffraction wave of grating mask is based on rigorous coupled-wave analysis method. In this paper, the general diffraction analysis numerical code based on the rigorous coupled-wave analysis (RCWA) is written by MATLAB software to calculate the 0th refraction wave of grating mask. Since large measurement errors will occur while measuring the grove shape by AFM, the method of measuring the initial phase of diffraction wave was proposed and the feasibility of this method has also been verified.","PeriodicalId":380113,"journal":{"name":"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Method for the measurement of surface-relief grating’s profile using initial phase of diffraction wave\",\"authors\":\"Fanrong Feng, Jianhong Wu, Fei Gao\",\"doi\":\"10.1117/12.2197989\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The analysis of initial phase of diffraction wave of grating mask is based on rigorous coupled-wave analysis method. In this paper, the general diffraction analysis numerical code based on the rigorous coupled-wave analysis (RCWA) is written by MATLAB software to calculate the 0th refraction wave of grating mask. Since large measurement errors will occur while measuring the grove shape by AFM, the method of measuring the initial phase of diffraction wave was proposed and the feasibility of this method has also been verified.\",\"PeriodicalId\":380113,\"journal\":{\"name\":\"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors\",\"volume\":\"25 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-11-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2197989\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2197989","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

光栅掩模衍射波的初始相位分析基于严格的耦合波分析方法。本文利用MATLAB软件编写了基于严格耦合波分析(RCWA)的通用衍射分析数值代码，用于计算光栅掩模的第0折射波。由于原子力显微镜在测量小树丛形状时会产生较大的测量误差，提出了测量衍射波初始相位的方法，并验证了该方法的可行性。

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Method for the measurement of surface-relief grating’s profile using initial phase of diffraction wave

The analysis of initial phase of diffraction wave of grating mask is based on rigorous coupled-wave analysis method. In this paper, the general diffraction analysis numerical code based on the rigorous coupled-wave analysis (RCWA) is written by MATLAB software to calculate the 0th refraction wave of grating mask. Since large measurement errors will occur while measuring the grove shape by AFM, the method of measuring the initial phase of diffraction wave was proposed and the feasibility of this method has also been verified.

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International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors

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