传感应用的氮化硅光子平台

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925177

P. Hélin, N. Pham, S. Lenci, A. R. Chaudhuri, A. Firrincieli, M. Mannarino

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引用次数: 2

摘要

本文报道了一个200mm LPCVD氮化硅平台在1550nm至2150nm大波长范围内的低传播损耗0.08dB/cm的最新数值。该平台是专门为传感应用而设计的，通过提供一个大的氧化窗开口来显示波导与介质的相互作用。此外，额外的模块，如反射器，加热器和键垫增加了更多的功能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Silicon nitride photonic platform for sensing applications

This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of low propagation loss 0.08dB/cm over a large wavelength range from 1550nm to 2150nm. This platform is specifically designed for sensing applications by providing a large oxide window opening to reveal the waveguide for interaction with a medium. Moreover, extra modules like reflector, heater and bond pads are added for more functionalities.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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