对具有ESD敏感硬件的洁净室所用材料进行评估

Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000 (IEEE Cat. No.00TH8476) Pub Date : 2000-09-26 DOI:10.1109/EOSESD.2000.890040

T. Lesniewski, K. Yates

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引用次数: 1

摘要

对近90种产品进行了测量，以确定其清洁度和ESD防护性能。测试的材料类别包括地砖和垫子、手套、指套、袋子和床单材料、服装、拭子和湿巾。使用了多种测试方法来评估材料。结果表明，很少有产品具有小于1 mg/ft/sup 2/的非挥发性残留物和静态耗散特性。

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Evaluation of materials used in cleanrooms with ESD sensitive hardware

Measurements were done on nearly 90 products to determine their cleanliness and ESD protective properties. Categories of materials tested include floor tiles and mats, gloves, finger cots, bags and sheeting materials, garments, swabs and wipes. A variety of test methods was used to evaluate the materials. The results showed that few products had both nonvolatile residue less than 1 mg/ft/sup 2/ and static dissipative properties.

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Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000 (IEEE Cat. No.00TH8476)

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