原子力显微镜中控制带宽与测量精度的权衡

S. Kuiper, P. V. D. Van den Hof, G. Schitter
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引用次数: 2

摘要

在原子力显微镜中,尖端和样品之间的力被控制在一个反馈回路中,以防止扫描过程中尖端和样品的损坏,并且还将力测量转换为样品形貌的估计。在本文中,实验表明,在控制系统的设计中,由于系统的动态不确定性,必须在反馈环路的带宽和地形估计的精度之间进行直接权衡。提出了几种降低成像系统动态不确定性的方法,以实现更快、更准确的AFM成像。此外,讨论并实验验证了一种补偿压电致动器内部迟滞所造成的成像精度损失的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy
In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.
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