建立了激光辅助键合(LAB)过程中倒装封装温度的数值模拟模型

J. Lee, S. Kim, B. Kim
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引用次数: 0

摘要

激光辅助键合(LAB)技术是近年来发展起来的新一代技术。焊料的温度能否上升到熔点以上并保持足够的熔点,是影响焊接质量的一个非常重要的因素。然而,现有的测量方法只能测量硅芯片的温度,因此焊料的温度仍然不清楚。因此,为了预测在LAB过程中包括焊料凸起在内的整个倒装封装的温度,建立了一个数值模拟模型。采用有限体积法求解了瞬态热传导的控制方程。根据激光的光学特性分析了每一层的吸收激光,这有助于控制方程的热生成率。基于凸点在熔化过程中接触面积的增加,从点接触到面积接触,将凸点熔化过程改为根据凸点与衬底的接触面积引入有效导热系数。通过本研究建立的仿真模型,得到了LAB过程的瞬态温度分布。将仿真模型得到的硅片温度与红外测温法测得的温度进行了比较,验证了仿真模型的正确性。模拟结果和红外测温均显示了温度曲线的拐点,证实了熔融过程得到了很好的反映。此外,期望利用本研究开发的数值模拟可以分析翘曲问题和优化的工艺条件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of a numerical simulation model for predicting the temperature of a flip-chip package during the laser-assisted bonding (LAB) process
The Laser-assisted bonding (LAB) method has recently been developed as a next-generation technology. It is a very important factor for the quality of bonding whether the temperature of solder rises above the melting point and maintains enough to melt. However, by the existing measurement method, only the temperature of the silicon chip can be measured so the temperature of solder is still unclear. Therefore, to predict the temperature of the whole flip-chip package including the solder bumps during the LAB process, a numerical simulation model is developed. Governing equations for transient heat conduction are solved using the Finite Volume Method(FVM). The absorbed laser in each layer is analyzed based on the optical characteristics of the laser, which contributes to the heat generation rate of governing equation. Based on the increasing contact area of solder bump during the melting process, point-contact to area-contact, the melting process of solder bumps is replaced by introducing the effective thermal conductivity according to the contact area between solder bump and substrate. Through the simulation model developed in this study, the transient temperature profile during the LAB process is obtained. The temperature of the silicon chip obtained by the simulation model is compared to that measured by IR thermometry to validate the simulation model. It is confirmed that the melting process is well reflected through the fact that inflection points of temperature profile are shown in both simulation results and IR thermometry. Furthermore, it is expected that the warpage problem and optimized process conditions can be analyzed using the numerical simulation developed in this study.
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