BDS薄膜激光损伤竞赛十年发展趋势(会议报告)

C. Stolz, R. Negres
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引用次数: 1

摘要

博尔德损伤研讨会上的薄膜损伤竞赛系列提供了一个机会,观察不同涂层类型(高反射、反反射、偏光镜和法布里-珀罗滤光片)、波长范围(193 - 1064 nm)和脉冲长度范围(40 fs - 18 ns)之间激光损伤行为的一般趋势。此外,沉积工艺、涂层材料、清洁工艺和层数的影响可以在一年或更广泛的整个比赛历史中进行研究。尽管有参与者试图分离单个变量以更好地了解它对激光阻力的影响的情况,但这一系列的比赛为各种各样的参与者分离了损伤测试服务和协议的变量。在过去的十年中,共有来自58个不同参与者的275个样本在四个不同的激光损伤测试设施中进行了测试。除紫外应用外,Hafnia显然是最好的高折射率材料;虽然范围广,但高折射率材料表现良好。不同竞争对手的最佳沉积工艺差异很大,因此对涂层类型、波长和脉冲持续时间的依赖性更强。对于脉冲长度为纳秒级的1064 nm涂层,电子束涂层表现最好。对于短脉冲长度的近红外反射镜和纳秒脉冲长度的紫外反射镜,靶材溅射的致密涂层工艺表现最好。对于UV - AR涂层和准分子反射镜,两者都在纳秒脉冲长度下进行测试,他们倾向于采用非常低能量的沉积方法,产生软涂层,如用于AR的溶胶凝胶浸涂涂层和用于准分子反射镜的氟化物电阻加热涂层。最后,在该薄膜损伤竞赛的历史中,清洗方法和层数与激光电阻的相关性不太明显。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Trends Observed in Ten Years of the BDS Thin Film Laser Damage Competition (Conference Presentation)
The thin film damage competition series at the Boulder Damage Symposium provides an opportunity to observe general trends in laser damage behavior between different coating types (high reflector, anti-reflector, Polarizer, and Fabry-Perot filter), wavelength ranges (193 – 1064 nm), and pulse length ranges (40 fs – 18 ns). Additionally, the impact of deposition process, coating material, cleaning process, and layer count can be studied within a single year or more broadly across the history of this competition. Although there are instances where participants attempted to isolate a single variable to better understand it’s impact on laser resistance, this series of competitions isolates the variable of the damage testing service and protocol for a wide variety of participants. In total 275 samples from 58 different participants have been tested at four different laser damage testing facilities over the last ten years. Hafnia was clearly the best high refractive index material except for UV applications; although a wide range of high refractive index materials performed well. The best deposition process varied significantly between the different competitions, so it was much more strongly dependent on the coating type, wavelength, and pulse duration. For 1064 nm coatings with nanosecond scale pulse lengths, e-beam coatings tended to be the best performers. For short pulse length NIR mirrors and nanosecond pulse length UV mirrors, densified coating processes which all involved sputtering of the target material were the best performers. For UV AR coatings and excimer mirrors, both tested at nanosecond pulse lengths, they tended to favor very low energetic deposition methods yielding soft coatings such as sol gel dip coating for the AR and resistive heating of fluorides for the excimer mirrors. Finally cleaning method and layer count have had a less obvious correlation with laser resistance over the history of this thin film damage competition.
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