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引用次数: 1
摘要
在200 eV - 10 keV的宽能量范围内，通过测量捕获电荷量和SEE产率/spl δ /作为电流密度J和剂量D的函数，用SEM研究了绝缘体的充电特性。已经确定了依赖于J的三种固定充电制度(自我调节，老化，降解)。
Charging regimes of insulators under low energy electron beam (200 eV to 10 keV)
Charging properties of insulators are investigated with a SEM by measuring the amount of trapped charges and the SEE yield /spl delta/ as a function of current density J and dose D, in a wide energy range 200 eV - 10 keV. Three stationary charging regimes (self-regulation, ageing, degradation) depending on J have been identified.
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