用紫外切边技术控制微环谐振器加/降滤波器阵列的通道间距

Proceedings of 2002 IEEE/LEOS Workshop on Fibre and Optical Passive Components (Cat.No.02EX595) Pub Date : 2002-08-07 DOI:10.1109/FOPC.2002.1015802

S. Suzuki, Y. Hatakeyama, Y. Kokubun, S. Chu

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引用次数: 0

摘要

在多通道微环谐振器滤波器中，由于光掩膜的分辨率限制(50 nm)，波长通道间距被限制在5.7 nm。因此，我们开发了一种新的技术，通过紫外修剪技术，以聚硅烷作为覆盖层来精确控制通道间距。结果，我们成功地将通道间距减小到0.5 nm，并使用相同的修剪技术将通道间距精确控制到1.0 nm。

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Channel spacing control of microring resonator add/drop filter array by UV trimming technique

In the multi-channel microring resonator filter, the wavelength channel spacing was limited to 5.7 nm due to the resolution limit of the photomask (50 nm). Therefore, we developed a new technique to control precisely the channel spacing by a UV-trimming technique using polysilane as the over-cladding layer. As a result, we successfully decreased the channel spacing to 0.5 nm, and also controlled the channel spacing precisely to 1.0 nm using the same trimming technique.

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Proceedings of 2002 IEEE/LEOS Workshop on Fibre and Optical Passive Components (Cat.No.02EX595)

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