局部寿命控制的未来趋势[功率半导体器件]

8th International Symposium on Power Semiconductor Devices and ICs. ISPSD '96. Proceedings Pub Date : 1996-05-20 DOI:10.1109/ISPSD.1996.509471

J. Vobecký, P. Hazdra

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引用次数: 13

摘要

能量和剂量混合概念应用于离子辐照技术，用于局部寿命定制，显示能够创建客户特定的寿命概况。对新离子辐照下功率二极管的电学参数与能量分散粒子辐照下的电学参数进行了比较。

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Future trends in local lifetime control [power semiconductor devices]

Energy and dose mixing concept, applied in ion irradiation technology for local lifetime tailoring, is shown to be capable of creating a customer-specific lifetime profile. The electrical parameters of power diode, subjected to the new ion irradiation concept, are compared with those ones resulting from the energy dispersed alpha particle irradiation.

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8th International Symposium on Power Semiconductor Devices and ICs. ISPSD '96. Proceedings

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