Lanjiao Liu, Zuobin Wang, Z. Weng, Li Li, Jixing Cai, Litong Dong, Zhengxun Song, Hongmei Xu
{"title":"激光干涉光刻结构表面单纳米线的纳米操纵","authors":"Lanjiao Liu, Zuobin Wang, Z. Weng, Li Li, Jixing Cai, Litong Dong, Zhengxun Song, Hongmei Xu","doi":"10.1109/3M-NANO.2016.7824985","DOIUrl":null,"url":null,"abstract":"Nanomanipulation is an important technology to fabricate and assemble nanostructures, especially for the asymmetrical structures. This paper presents a method of manipulation of single nanowires on structured surfaces by nano grippers in a scanning electron microscope (SEM). In the method, the structured surfaces of substrate were fabricated by two-beam laser interference lithography. Single nanowires were manipulated on the structured surfaces by nano grippers in the SEM. The method uses a pattern to solve the problem that a single nanowire is too tiny to be picked up and manipulated with nano grippers.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanomanipulation of single nanowires on structured surfaces fabricated by laser interference lithography\",\"authors\":\"Lanjiao Liu, Zuobin Wang, Z. Weng, Li Li, Jixing Cai, Litong Dong, Zhengxun Song, Hongmei Xu\",\"doi\":\"10.1109/3M-NANO.2016.7824985\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nanomanipulation is an important technology to fabricate and assemble nanostructures, especially for the asymmetrical structures. This paper presents a method of manipulation of single nanowires on structured surfaces by nano grippers in a scanning electron microscope (SEM). In the method, the structured surfaces of substrate were fabricated by two-beam laser interference lithography. Single nanowires were manipulated on the structured surfaces by nano grippers in the SEM. The method uses a pattern to solve the problem that a single nanowire is too tiny to be picked up and manipulated with nano grippers.\",\"PeriodicalId\":273846,\"journal\":{\"name\":\"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"46 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2016.7824985\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2016.7824985","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanomanipulation of single nanowires on structured surfaces fabricated by laser interference lithography
Nanomanipulation is an important technology to fabricate and assemble nanostructures, especially for the asymmetrical structures. This paper presents a method of manipulation of single nanowires on structured surfaces by nano grippers in a scanning electron microscope (SEM). In the method, the structured surfaces of substrate were fabricated by two-beam laser interference lithography. Single nanowires were manipulated on the structured surfaces by nano grippers in the SEM. The method uses a pattern to solve the problem that a single nanowire is too tiny to be picked up and manipulated with nano grippers.