{"title":"纳米技术-纳米结构x射线和EUV光学的最新发展","authors":"A. Kubec, F. Döring","doi":"10.1364/euvxray.2022.ef3a.3","DOIUrl":null,"url":null,"abstract":": Recent developments have brought significant improvements in X-ray and EUV optics and optical structures. We will discuss how this can improve current setups and measurements with added functionalities and efficiency. At","PeriodicalId":165872,"journal":{"name":"Optica High-brightness Sources and Light-driven Interactions Congress 2022","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"XRnanotech – Recent Developments In Nanostructured X-ray And EUV Optics\",\"authors\":\"A. Kubec, F. Döring\",\"doi\":\"10.1364/euvxray.2022.ef3a.3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\": Recent developments have brought significant improvements in X-ray and EUV optics and optical structures. We will discuss how this can improve current setups and measurements with added functionalities and efficiency. At\",\"PeriodicalId\":165872,\"journal\":{\"name\":\"Optica High-brightness Sources and Light-driven Interactions Congress 2022\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optica High-brightness Sources and Light-driven Interactions Congress 2022\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/euvxray.2022.ef3a.3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optica High-brightness Sources and Light-driven Interactions Congress 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/euvxray.2022.ef3a.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
XRnanotech – Recent Developments In Nanostructured X-ray And EUV Optics
: Recent developments have brought significant improvements in X-ray and EUV optics and optical structures. We will discuss how this can improve current setups and measurements with added functionalities and efficiency. At
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