{"title":"利用微波进行几何测量","authors":"V. I. Matveev","doi":"10.14489/td.2022.04.pp.048-054","DOIUrl":null,"url":null,"abstract":"The article presents an overview of methods for measuring geometric parameters – the thickness of dielectric materials and products using ultrahigh frequency radio waves. The main methods of thickness measurement are considered: geometric, amplitude-phase, frequency-phase, ellipsometric, with examples and characteristics of their practical application. The schemes of implemented microwave thickness gauges and converters are given.","PeriodicalId":432853,"journal":{"name":"Kontrol'. Diagnostika","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"GEOMETRIC MEASUREMENTS USING MICROWAVES\",\"authors\":\"V. I. Matveev\",\"doi\":\"10.14489/td.2022.04.pp.048-054\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The article presents an overview of methods for measuring geometric parameters – the thickness of dielectric materials and products using ultrahigh frequency radio waves. The main methods of thickness measurement are considered: geometric, amplitude-phase, frequency-phase, ellipsometric, with examples and characteristics of their practical application. The schemes of implemented microwave thickness gauges and converters are given.\",\"PeriodicalId\":432853,\"journal\":{\"name\":\"Kontrol'. Diagnostika\",\"volume\":\"46 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Kontrol'. Diagnostika\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.14489/td.2022.04.pp.048-054\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Kontrol'. Diagnostika","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14489/td.2022.04.pp.048-054","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The article presents an overview of methods for measuring geometric parameters – the thickness of dielectric materials and products using ultrahigh frequency radio waves. The main methods of thickness measurement are considered: geometric, amplitude-phase, frequency-phase, ellipsometric, with examples and characteristics of their practical application. The schemes of implemented microwave thickness gauges and converters are given.
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