Z. Habibah, N. Syafawati, L. N. Ismail, R. A. Bakar, M. H. Mamat, M. Rusop
{"title":"化学溶液法沉积单层ZnO上MgO薄膜的电学、介电和结构性能","authors":"Z. Habibah, N. Syafawati, L. N. Ismail, R. A. Bakar, M. H. Mamat, M. Rusop","doi":"10.1109/SHUSER.2012.6268883","DOIUrl":null,"url":null,"abstract":"The electrical, dielectric and structural properties of multilayer ZnO/MgO films prepared by simple chemical deposition technique were investigated using I-V measurement, impedance spectroscopy analyzer and field emission scanning electron microscope (FESEM). From the observation, it shows that the annealing temperature influence the electrical, dielectric and structural properties of ZnO/MgO multilayer films. Denser films and small particles are produced as the annealing temperature increase from 400°C to 500°C with 25°C interval.","PeriodicalId":426671,"journal":{"name":"2012 IEEE Symposium on Humanities, Science and Engineering Research","volume":"106 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Electrical, dielectric and structural properties of MgO thin films deposited on single layer ZnO using chemical solution method\",\"authors\":\"Z. Habibah, N. Syafawati, L. N. Ismail, R. A. Bakar, M. H. Mamat, M. Rusop\",\"doi\":\"10.1109/SHUSER.2012.6268883\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The electrical, dielectric and structural properties of multilayer ZnO/MgO films prepared by simple chemical deposition technique were investigated using I-V measurement, impedance spectroscopy analyzer and field emission scanning electron microscope (FESEM). From the observation, it shows that the annealing temperature influence the electrical, dielectric and structural properties of ZnO/MgO multilayer films. Denser films and small particles are produced as the annealing temperature increase from 400°C to 500°C with 25°C interval.\",\"PeriodicalId\":426671,\"journal\":{\"name\":\"2012 IEEE Symposium on Humanities, Science and Engineering Research\",\"volume\":\"106 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-06-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE Symposium on Humanities, Science and Engineering Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SHUSER.2012.6268883\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE Symposium on Humanities, Science and Engineering Research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SHUSER.2012.6268883","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Electrical, dielectric and structural properties of MgO thin films deposited on single layer ZnO using chemical solution method
The electrical, dielectric and structural properties of multilayer ZnO/MgO films prepared by simple chemical deposition technique were investigated using I-V measurement, impedance spectroscopy analyzer and field emission scanning electron microscope (FESEM). From the observation, it shows that the annealing temperature influence the electrical, dielectric and structural properties of ZnO/MgO multilayer films. Denser films and small particles are produced as the annealing temperature increase from 400°C to 500°C with 25°C interval.
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