场射极阵列局部发射调节和防弧方法及结构

J. Shaw, D. Hsu
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引用次数: 2

摘要

我们提出了一种替代的电弧预防和发射调节方法,该方法允许高电流密度并强制窄能量分布。该方法需要在通常的栅极孔径上包含一个滤光孔的结构。顶部孔径充当高通能量滤波器。当滤波器相对于栅极为负时,在发射电子的路径上产生势能势垒。此外,在超高压下操作发射器后,能量分布往往变得更窄,更接近E/sub F/。能量位移表明发射极的电位下降减小,表明介电表面层变得更导电和/或更薄。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Method and structure for local emission regulation and arc prevention in field emitter arrays
We propose an alternative arc-prevention and emission regulation method that allows high current densities and enforces a narrow energy distribution. The method requires a structure incorporating a filter aperture over the usual gate aperture. The top aperture acts as a high-pass energy filter. When the filter is negative with respect to the gate, a potential energy barrier is created in the path of the emitted electrons. Also, the energy distribution often becomes narrower and shifts closer to E/sub F/ after operating the emitters in UHV. The energy shift shows that the potential drop in the emitter is reduced, suggesting that the dielectric surface layer has become more conductive and/or thinner.
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