具有铁电栅绝缘体的负电容场效应晶体管的器件仿真

J. Hattori, T. Ikegami, K. Fukuda, H. Ota, S. Migita, H. Asai
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引用次数: 4

摘要

将以铁电薄膜为栅极绝缘体的负电容场效应晶体管的模拟方法考虑到计算机辅助设计器件模拟器技术的框架中,提出了一种完全适用的模拟方法。该方法采用Landau-Khalatnikov方程描述铁电体的极化行为,并与泊松方程同时求解,得到铁电体的极化分布和静电势。此外,所提出的方法使器件模拟器能够考虑与形成极化域结构有关的因素。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Device Simulation of Negative-Capacitance Field-Effect Transistors With a Ferroelectric Gate Insulator
We consider the method to simulate negative-capacitance field-effect transistors having a ferroelectric film as a gate insulator in the framework applicable to technology computer-aided design device simulators and propose a method with complete applicability. In the method, the behavior of the polarization in ferroelectrics is described by the Landau-Khalatnikov equation and it is solved simultaneously with the Poisson equation to obtain the distribution of the polarization and electrostatic potential. Also, the proposed method enables the device simulators to take into account a factor related to forming domain structures of the polarization.
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