非导电射频和直流热载流子应力对射频功率放大器FinFET可靠性的影响

X. Ding, G. Niu, H. Zhang, W. Wang, K. Imura, F. Dai
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引用次数: 2

摘要

本文首次在14/16纳米FinFET生产技术上,针对射频放大器中常用的高压器件,实验研究了非导电RF和DC应力对晶体管I-V和RF特性的影响。退化显示为非准静态(NQS),并且不允许使用直流应力来预测射频应力下的设备寿命。进一步的建模表明,这些finfet为预期的PA应用提供了足够的非导电射频应力余量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of non-Conducting RF and DC Hot Carrier Stresses on FinFET Reliability for RF Power Amplifiers
Impact of non-conducting RF and DC stresses on transistor I-V and RF characteristics are investigated experimentally on a production 14/16-nm FinFET technology for the first time, for high voltage devices commonly used in RF PAs. The degradation is shown to be non-quasi static (NQS), and does not permit the use of DC stress to predict device lifetime under RF stress. Further modeling shows that these FinFETs provide enough margins against non-conducting RF stress for intended PA application.
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