基于有限元的二维微反射镜建模与优化

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Pub Date : 2011-04-18 DOI:10.1109/ESIME.2011.5765782

W. Schock, J. Mehner, J. Fritz, Jorg Muchow, C. Friese, S. Pinter

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引用次数: 7

摘要

基于数值模拟对二维扫描微镜进行了建模，并利用Matlab优化工具箱对其进行了优化。仿真模型涵盖了结构效应、流体效应和静电效应。优化的目标是低驱动电压和对过程变化的鲁棒性。将优化设计的模拟性能与实验结果进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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FEM based modeling and optimization of a 2D micro mirror

A 2D scanning micro mirror is modelled based on numerical simulations and optimized using the Matlab optimization Toolbox. The simulation model covers structural, fluidic and electrostatic effects. The goals of the optimization are low driving voltages and robustness against process variations. The simulated behaviour of the optimized design is compared to experimental results.

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来源期刊

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

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