在大薄石英基板上复制微透镜阵列的辊压UV压印工艺的开发

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI:10.1109/NEMS.2012.6196715

L. Li, K. Ishii, Y. Tsutsui, S. Shoji, J. Mizuno

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引用次数: 1

摘要

在本研究中，利用柔性复制模和原始辊压UV压印系统进行了微透镜阵列(MLAs)的制造工艺。我们成功地展示了高通量的MLAs制造工艺。在厚度为0.15 mm的石英衬底上，用两种光固化树脂复制出面积为30 × 100 mm2的透镜图案。该工艺适用于下一代光器件的mla制造。

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Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

In this study, micro lens arrays (MLAs) fabrication process was carried out using flexible replica mold and an original roll press UV imprint system. We successfully demonstrated MLAs fabrication process with high throughput. The lens patterns of 30 × 100 mm2 in area replicated by two photo-curable resins were formed on the quartz substrate of 0.15 mm in thickness. This fabrication process is applicable for MLAs fabrication of next generation optical devices.

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来源期刊

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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