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引用次数: 0
摘要
本文讨论了对低成本旋转涂布机样机进行的硬件和软件修改,以提高其在运行过程中的稳定性,并在保持恒定速度的情况下减少稳态误差。该设备使用Arduino MEGA 2560无刷直流电机。本文还讨论了基于频率电压集成电路的两个附加接口的实现,以提高控制信号和反馈传感器的分辨率。采用PI闭环控制器和防上发条反计算算法,允许用户对加速(和减速)时间和期望的最终速度进行编程,最多可达10级。有可能将平均误差从2%降低到0.1%,并产生平均线性度为0.9的斜坡。
This article discusses the hardware and software modifications that were made to a low-cost Spin Coater prototype in order to improve its stability during operation and reduce the steady state error while maintaining a constant speed. This device uses a brushless DC motor with an Arduino MEGA 2560. The implementation of two additional interfaces based on a frequency to voltage integrated circuit to increase the resolution of the control signal and of the feedback sensor is also discussed. A PI closed-loop controller along with an anti-windup back-calculation algorithm was implemented to allow the user to program the acceleration (and deceleration) time and the desired final speed for up to ten stages. It was possible to reduce the average error from 2% to 0.1% and to produce ramps with an average linearity of 0.9.