W. Cho, Kunnyun Kim, Kang Ryeol Lee, Yong-kook Kim, Dae-Sung Lee, W. Kim, N. Cho, Kwangbum Park, Hyo-Derk Park, J. Park, B. Ju
{"title":"聚合物薄膜柔性触觉传感器","authors":"W. Cho, Kunnyun Kim, Kang Ryeol Lee, Yong-kook Kim, Dae-Sung Lee, W. Kim, N. Cho, Kwangbum Park, Hyo-Derk Park, J. Park, B. Ju","doi":"10.1109/ICSENS.2007.355572","DOIUrl":null,"url":null,"abstract":"We present the fabrication process and the characteristics of a flexible tactile sensor by silicon micromachining, polymer processing and packaging technologies. The fabrication process for the tactile sensor was composed of in the fabrication of sensor chips and their packaging on the flexible printed circuit board (FPCB). The variation rate of resistance was about 4.6%/N when normal force was applied. This sensor can be used to sense touch, pressure, and slip because the signals are is are determined by the variations of resistance of the metal strain gauge for normal and shear force in tactile sensor.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Flexible Tactile Sensor Fabricated using Polymer Membrane\",\"authors\":\"W. Cho, Kunnyun Kim, Kang Ryeol Lee, Yong-kook Kim, Dae-Sung Lee, W. Kim, N. Cho, Kwangbum Park, Hyo-Derk Park, J. Park, B. Ju\",\"doi\":\"10.1109/ICSENS.2007.355572\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present the fabrication process and the characteristics of a flexible tactile sensor by silicon micromachining, polymer processing and packaging technologies. The fabrication process for the tactile sensor was composed of in the fabrication of sensor chips and their packaging on the flexible printed circuit board (FPCB). The variation rate of resistance was about 4.6%/N when normal force was applied. This sensor can be used to sense touch, pressure, and slip because the signals are is are determined by the variations of resistance of the metal strain gauge for normal and shear force in tactile sensor.\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"49 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355572\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355572","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Flexible Tactile Sensor Fabricated using Polymer Membrane
We present the fabrication process and the characteristics of a flexible tactile sensor by silicon micromachining, polymer processing and packaging technologies. The fabrication process for the tactile sensor was composed of in the fabrication of sensor chips and their packaging on the flexible printed circuit board (FPCB). The variation rate of resistance was about 4.6%/N when normal force was applied. This sensor can be used to sense touch, pressure, and slip because the signals are is are determined by the variations of resistance of the metal strain gauge for normal and shear force in tactile sensor.
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